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MEMS and microsystems :design and manufacture...
by
Hsu, Tai
Ran.
Includes bibliographical references (p. 427-431) and index.;...
Edition
-
ISBN/ISSN
9780072393910
Collation
xii, 436 p. : - ill. ; 24 cm.
Series Title
-
Call Number
LEN 621.381 HSU
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