Text

MEMS and microsystems :design and manufacture

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Includes bibliographical references (p. 427-431) and index.;

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Availability

Detail Information

Series Title

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Call Number

LEN 621.381 HSU

Publisher

Boston : : McGraw-Hill,., 2002

Collation

xii, 436 p. : - ill. ; 24 cm.

Language

English

ISBN/ISSN

9780072393910

Classification

621.381

Content Type

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Media Type

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Carrier Type

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Edition

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Subject(s)

Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.

Specific Detail Info

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Statement of Responsibility

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